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1 article(s) from Käämbre, Tanel

Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone

Kristjan Kalam,
Peeter Ritslaid,
Tanel Käämbre,
Aile Tamm and
Kaupo Kukli

Beilstein J. Nanotechnol. 2023, 14, 1085–1092, doi:10.3762/bjnano.14.89

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Figure 1: Dependence of SnO₂ film GPC on the evaporation temperature of the SnI₄ precursor. The cycle times w...

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Figure 2: Time evolution of the QCM mass sensor signal during five sequential ALD cycles (a), and during one ...

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Figure 3: QCM frequency decrement measured per single ALD cycle as function of the SnI₄ pulse length. The len...

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Figure 4: SnO₂ film GPC as function of the number of ALD cycles.

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Figure 5: SnO₂ GPC as function of the substrate temperature.

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Figure 6: Oxygen content in the SnO₂ films as function of the substrate temperature.

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Figure 7: Content of residual iodine in tin oxide films deposited from tin iodide and ozone in the temperatur...

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Figure 8: GIXRD patterns of SnO₂ films deposited at the given temperatures. Miller indices attributed to the ...

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Figure 9: Refractive index of a SnO₂ film deposited at 300 °C to a thickness of 110 nm as function of the wav...

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Figure 10: XPS results of (a) Sn 3d, (b) O 1s, and (c) valence-band region of the SnO₂ films deposited at 300 ...

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Figure 11: XAS results depicting O 1s (a) and Sn 3d (b) spectra of the SnO₂ films deposited at 300 and 500 °C.

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Published 13 Nov 2023

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